Hana ʻia ka wafer me ke silikoni maʻemaʻe (Si). Hoʻokaʻawale maʻamau i 6-ʻīniha, 8-ʻīniha, a me 12-ʻīniha kikoʻī, hana ʻia ka wafer ma muli o kēia wafer. ʻO nā wafers silikoni i hoʻomākaukau ʻia mai nā semiconductor maʻemaʻe kiʻekiʻe ma o nā kaʻina hana e like me ka huki aniani a me ka ʻoki ʻana i kapa ʻia he wafers becahe poepoe ko lakou ano. Hiki ke hana ʻia nā ʻano hana ʻāpana kaapuni like ʻole ma nā wafer silika e lilo i huahana me nā waiwai uila kikoʻī. nā huahana kaapuni hoʻohui hana. Hele nā wafers ma ke ʻano o nā kaʻina hana semiconductor e hana i nā hale kaapuni liʻiliʻi loa, a laila ʻoki ʻia, hoʻopili ʻia, a hoʻāʻo ʻia i loko o nā ʻāpana, i hoʻohana nui ʻia i nā mea uila like ʻole. Ua ʻike ʻia nā mea Wafer ma mua o 60 mau makahiki o ka hoʻomohala ʻenehana a me ka hoʻomohala ʻana i ka ʻoihana, e hana ana i kahi kūlana ʻoihana i hoʻomalu ʻia e ka silika a hoʻohui ʻia e nā mea semiconductor hou.
Hana ʻia ka 80% o nā kelepona paʻa lima a me nā kamepiula ma Kina. Ke hilinaʻi nei ʻo Kina i ka lawe ʻana mai no ka 95% o kāna mau ʻāpana hana kiʻekiʻe, no laila hoʻohana ʻo Kina i ka US $ 220 biliona i kēlā me kēia makahiki no ka lawe ʻana mai i nā chips, ʻo ia ka pālua o ka lawe ʻana mai o ka aila makahiki o Kina. Hoʻopaʻa ʻia nā lako a me nā mea e pili ana i nā mīkini photolithography a me ka hana chip, e like me nā wafers, nā metala maʻemaʻe kiʻekiʻe, nā mīkini etching, etc.
I kēia lā e kamaʻilio pōkole mākou e pili ana i ke kumu o ka holoi ʻana i nā kukui UV o nā mīkini wafer. I ke kākau ʻana i ka ʻikepili, pono e hoʻokomo i ka uku i loko o ka puka lana ma ke kau ʻana i kahi VPP voli kiʻekiʻe i ka puka, e like me ka mea i hōʻike ʻia ma ke kiʻi ma lalo nei. No ka mea, ʻaʻole i loaʻa ka ikehu o ka hoʻopiʻi i hoʻopaʻa ʻia e komo i ka paia ikehu o ka kiʻiʻoniʻoni silicon oxide, hiki iā ia ke mālama i ke kūlana quo, no laila pono mākou e hāʻawi i ka uku i kekahi nui o ka ikehu! ʻO kēia ka manawa e pono ai ke kukui ultraviolet.
Ke loaʻa i ka puka lana ka ultraviolet irradiation, loaʻa i nā electrons i ka puka lana ka ikehu o ka ultraviolet light quanta, a lilo nā electrons i nā electrons wela me ka ikehu e komo i ka paia ikehu o ke kiʻiʻoniʻoni silicon oxide. E like me ka mea i hōʻike ʻia ma ke kiʻi, komo nā electrons wela i ke kiʻiʻoniʻoni silicon oxide, kahe i ka substrate a me ka puka, a hoʻi i ke kūlana holoi ʻia. Hiki ke hana wale ʻia ka hana holoi ʻana ma ka loaʻa ʻana o ka ultraviolet irradiation, ʻaʻole hiki ke holoi ʻia me ka uila. I nā huaʻōlelo ʻē aʻe, hiki ke hoʻololi wale ʻia ka helu o nā bits mai "1" a i "0", a ma ka ʻaoʻao ʻē aʻe. ʻAʻohe ala ʻē aʻe ma mua o ka holoi ʻana i nā mea āpau o ka chip.
Ua ʻike mākou ʻo ka ikehu o ka mālamalama i hoʻohālikelike ʻia me ka lōʻihi o ka nalu o ka mālamalama. I mea e lilo ai nā electrons i mau electrons wela a no laila e loaʻa ai ka ikehu e komo i ke kiʻi oxide, ʻo ka irradiation o ka mālamalama me ka lōʻihi o ka nalu pōkole, ʻo ia hoʻi, nā kukui ultraviolet. No ka mea e pili ana ka manawa holoi i ka helu o nā kiʻi, ʻaʻole hiki ke hoʻopōkole ʻia ka manawa holoi ma nā lōʻihi hawewe pōkole. ʻO ka maʻamau, hoʻomaka ka holoi ʻana i ka wā e kokoke ana ka nalu nalu ma kahi o 4000A (400nm). Hiki i ka saturation ma kahi o 3000A. Ma lalo o 3000A, ʻoiai inā ʻoi aku ka pōkole o ka nalu, ʻaʻohe hopena i ka manawa holoi.
ʻO ka maʻamau no ka holoi ʻana o UV ka mea maʻamau e ʻae i nā kukui ultraviolet me ka lōʻihi hawewe pololei o 253.7nm a me ka ikaika o ≥16000 μ W /cm². Hiki ke hoʻopau ʻia ka hana holoi ʻana e ka manawa hōʻike mai 30 mau minuke a i 3 mau hola.
Ka manawa hoʻouna: Dec-22-2023